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Handbook of Silicon Wafer Cleaning Technology
Karen Reinhardt , Werner Kern
Technology & Engineering / Electronics / Circuits / Integrated
- Focused on silicon wafer cleaning techniques including wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits
- As this book covers the major technologies for removing contaminants, it is a reliable reference for anyone that manufactures integrated circuits, or supplies the semiconductor and microelectronics industries
- Covers processes and equipment, as well as new materials and changes required for the surface conditioning process
- Editors are two of the top names in the field and are both extensively published
- Discusses next generation processing techniques including supercritical fluid, laser, and cryoaerosol
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